| Acronym | Meaning |
| MPCVD | Microwave Plasma Chemical Vapor Deposition |
| AIDS | Acquired Immune Deficiency Syndrome |
| EAM | Electron Acoustic Microscopy |
| EOT | Equivalent Oxide Thickness |
| EMG | Exponentially Modified Gaussian |
| WAND | Wide Angle Neutron Diffraction |
| PCNA | Proliferating Cell Nuclear Antigen |
| BMS | Bristol-Myers Squibb |
| SASU | Source Apportionment |
| CIP | Cold Isostatic Pressing |