| Acronym | Meaning |
 | PFPE | Perfluorinated Polyether |
| FIB | Focused Ion Beam |
| CCSEM | Computer-controlled Scanning Electron Microscopy |
| EUVID | Extreme UV Imaging Detector |
| HESS | High Energy Stereoscopic System |
| SME | Solid-metal Embrittlement |
| PCILO | Perturbative Configuration Interaction Using Localized Orbitals |
| ISD | Inclined Substrate Deposition |
| DDE | Dichlorodiphenyldichloroethylene |
| BASTM | Beam-assisted Scanning Tunneling Microscope |
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