| Acronym | Meaning |
| CAIBE | Chemically Assisted Ion Beam Etching |
| SALCCSD | Spin-adapted Linear Coupled-cluster (with) Single And Double Excitations) |
| ASM | American Society For Metals |
| OLPGAA | On-line Prompt Gamma-ray Activation Analysis |
| SOM | Self-organizing Map |
| BESOI | Bonded And Etched-back Silicon-on-insulator |
| AEY | Auger Electron Yield |
| BSRT | Biological Solids Retention Time |
| TDRH | Time-dependent Rotated Hartree (theory) |
| CCC | Copyright Clearance Center |