| Acronym | Meaning |
| DHXP | Dihexyl Phthalate |
| LEERM | Low Energy Electron Reflection Microscopy |
| RAS | Reflectance Anisotropy Spectroscopy |
| SSGF | Self-consistent Surface Green Function |
| RCS | Recoupled Centrifugal Sudden (approxn. |
| QA/QC | Quality Assurance/quality Control |
| TCSCF | Two-configuration Self-consistent Field Procedure |
| LCAO | Linear Combination Of Atomic Orbitals |
| MOVPE | Metallo-organic Vapor-phase Epitaxy |
| SIMS | Secondary Ion Mass Spectrometry |