| Acronym | Meaning |
 | EUVL | Extreme Ultraviolet Lithography |
| ATG | Antithymocyte Globulin |
| UCMR | Unregulated Contaminant Monitoring Regulation |
| RTD | Residence Time Distribution |
| TO | Toxic Organic |
| GDP | Guanosine 5'-diphosphate |
| CFSS | Constant-final-state Spectroscopy |
| NAAQS | National Ambient Air Quality Standards |
| DXS | Diffuse X-ray Scattering |
| DMCP | DOE Methods Compendium Program |
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