| Acronym | Meaning |
| MLE | Molecular Layer Epitaxy |
| MDC | Macrophage Derived Chemokine |
| VX | O-ethyl-S-2-diisopropylaminoethyl Methylphosphonothiolate |
| PZT | Piezoelectric Transducer |
| TDC | Top Dead Center |
| NOEC | No Observed Effect Concentration |
| EXEFS | Extended X-ray Emission Fine Structure |
| HAPS | Hazardous Air Pollutants |
| BARC | Bottom Antireflective Coating |
| PAB | Particle Associated Bacteria |