| Acronym | Meaning |
| CCM | Chemical Cleavage Of Mismatch |
| EVLSM | Evanescent Wave Light-scattering Microscopy |
| MONES | Molecular Nonthermal Excitation Spectrometry |
| CTC | Charge-transfer Complex |
| RTP | Rapid Thermal Processing |
| IFD | Industrial Facilities Discharge File (file Within STORET) |
| BOSS | Book Of SEMI Standards |
| SLP | Static Linear Polarization |
| RCT | Reference Control Technology |
| NRC | National Research Council |